Octafluorocyclopentene gaz

Octafluorocyclopentene gaz

Gaz octafluorocyclopentene ap pran rekonesans kòm yon mwayen siperyè grave nan fabwikasyon semi -conducte karakteristik .
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Pwodwi Entwodiksyon

Octafluorocyclopentene se yon pwen toksik, ki pa ki ka pran dife, ki ba bouyi (81 degre f) likid san koulè ak yon ti kras odè diferan .

Octafluorocyclopentene ak 99 . 99% Pite manifakti Swèd Jiangsu Mr Chemical Co., Ltd

 

Octafluorocyclopentene

 

CAS: 559-40-0

Einecs: 209-203-0

Un: 2810

Fòmil molekilè: C5F8

 

Octafluorocyclopentene gaz

 

Octafluorocyclopentene gas is gaining recognition as a superior etching medium in semiconductor fabrication due to its unique cyclic molecular structure. Unlike linear perfluorocarbons, octafluorocyclopentene gas demonstrates exceptional plasma stability and precise etching characteristics that enable superior profile control in high aspect ratio features. The gas's relatively high boiling point (-6°C) allows for easier handling compared to other etching gases, while its density (approximately 6.8 times heavier than air) requires specific safety protocols to prevent accumulation in confined spaces. Recent breakthroughs in 3D NAND flash memory production have particularly benefited from octafluorocyclopentene gas's ability to maintain consistent etch rates across deep trench structures. Environmental considerations surrounding octafluorocyclopentene gas focus on its global warming potential (estimated GWP of 7,200), prompting development of advanced abatement systems that can destroy over 99% of used gas. The compound's thermal stability (decomposition temperature >550 degre) fè li egalman valab kòm yon medyòm dielèktrik nan espesyalize ekipman segondè-vòltaj kote izolan tradisyonèl echwe .

 

Aplikasyon

 

Octafluorocyclopentene (OFCP) se sitou itilize nan endistri a semi -conducteurs, patikilyèman pou plasma pwosesis grave . Li la tou yon materyèl kòmanse pou sentèz lòt konpoze perfluorinée yo itilize nan aparèy optoelectronic ak lòt aplikasyon.}}}}}}}}}}}}}}}}

 

Sekirite

 

  • Toujou itilize an akò avèk fèy done sekirite (SDS) .
  • Silenn dwe estoke ak itilize nan yon pozisyon mache dwat, sekirite nan yon zòn ki byen ayere oswa kontwole .
  • Toujou swiv kondisyon kòd dife lokal yo lè estoke silenn gaz .
  • Gwo danje: dife, asfiksi .

 

Anbalaj

 

Espesifikasyon silenn

Sa

Kapasite silenn

Pwa

10L

10kg

47L

20kg

 

Baj popilè: Octafluorocyclopentene gaz, Lachin octafluorocyclopentene gaz manifaktirè, founisè, faktori

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